He aha ka pā poli wafer keramika alumina maʻemaʻe kiʻekiʻe?

Me ka wikiwiki o ka hoʻomohala ʻana o ka ʻoihana semiconductor, ua piʻi koke ka nui o ka ʻoihana, a ua hoʻomau ka ulu ʻana o nā lako hana semiconductor i ka pololei a me ka paʻakikī. No ka mea, he mau pono ko nā keramika o ka paʻakikī kiʻekiʻe, ka modulus elastic kiʻekiʻe, ke kūpaʻa kiʻekiʻe o ka ʻaʻahu, ka insulation kiʻekiʻe, ke kūpaʻa i ka palaho, ka hoʻonui haʻahaʻa, a me nā mea ʻē aʻe, hiki ke hoʻohana ʻia ma ke ʻano he mau ʻāpana o ka mīkini polishing silicon, nā lako hana wela epitaxial/oxidation/diffusion, ka mīkini lithography, nā lako deposition, nā lako etching semiconductor, ka mīkini hoʻokomo ion a me nā lako ʻē aʻe, no laila ʻo ka noiʻi a me ka hoʻomohala ʻana a me ka hana ʻana o nā ʻāpana keramika pololei e pili pololei i ka hoʻomohala ʻana o ka ʻoihana semiconductor. Ke piʻi nei nā koi loea o kona hoʻomākaukau ʻana.

ʻO ka alumina maʻemaʻe kiʻekiʻe, 99.7%-99.9% alumina.
ʻO ka ikaika mechanical kiʻekiʻe, ke kūpaʻa ʻana i ke komo ʻana, ka pale uila kiʻekiʻe, ke kūpaʻa kemika kiʻekiʻe, ke kūpaʻa wela maikaʻi a me ke kūpaʻa i ka pala. I kēia manawa, ʻo ka hoʻohana ʻana i ka wili keramika disc wili semiconductor silicon wafer ka ʻano wili ʻoi loa a ʻoi loa. Hoʻohana ʻia ke kaʻina wili ʻelua ʻaoʻao e wili i ka wafer silicon ʻokiʻoki, a hoʻomaikaʻi ʻia ke ʻano o ka wafer wili ma ka hoʻomaikaʻi ʻana i ke kaʻina wili (mea disc, wai wili, kaomi wili a me ka wikiwiki wili, a pēlā aku). Ma ke ʻano kūikawā, ʻo ka hoʻohana ʻana i nā papa keramika ma kahi o nā papa hao i hoʻolei ʻia, i mea e pale aku ai i ka wili ʻana ma ka ʻili nui o ka wafer i hoʻokumu ʻia e nā ʻeha a i ʻole ka haumia, e hōʻemi i ka hoʻokomo ʻana o nā ion metala, hiki ke hōʻemi i ka hana ʻana o ka silicon ma hope, e hoʻopōkole i ka manawa hana ma hope (corrosion), hoʻomaikaʻi i ka pono hana, a hoʻemi i ka nalowale o ka hana silicon, hoʻomaikaʻi nui i ka hoʻohana ʻana o ka silicon.

Papa hoʻowali wafer alumina kiʻekiʻeHoʻohana ʻia i loko o ka semiconductor, petroleum, kemika, photovoltaic, kristal wai a me nā ʻoihana ʻē aʻe, e like me nā ʻāpana mechanical, nā ʻāpana uila, ka microwave induction disk, nā mea insulation a me nā ʻāpana ʻē aʻe, nā mea semiconductor, nā lako vacuum, nā lako hana kristal wai a me nā ʻāpana ʻē aʻe. He waiwai nui ka nui o nā keramika alumina maʻemaʻe a me ka maʻemaʻe kiʻekiʻe i ka ʻoihana sapphire a me ka ʻoihana semiconductor chip. He kākoʻo koʻikoʻi ia a hoʻopau ʻia no ka polishing mechanical kemika (CMP) o nā wafers sapphire a me semiconductor silicon. Hiki ke hoʻohana ʻia nā keramika alumina maʻemaʻe nui a me ka maʻemaʻe kiʻekiʻe ma ke ʻano he substrate alumina no LCD.